【摘要】 探讨了一种在MEMS中常见的流动系统,对N-S方程加以改进,建立相应的理论模型。采用广义微分积分方法(GDQ)进行流场数值模拟,并用蒙特卡洛直接模拟方法(DSMC)来加以验证。结果表明:新建理论模型的模拟结果与DSMC模拟结果基本吻合。该理论模型可以模拟滑移区和过渡流动区的气体流动;GDQ方法程序简单,计算成本低。更多还原

【Abstract】 At present MEMS has turned into a very active research field.This paper explores a common flow system in MEMS and builds a theoretical model based on improved N-S Equation.We use the generalized differential quadrature method(GDQ) to make the numerical simulation of flow field and verify the new model by the direct simulation of Monte Carlo approach(DSMC).The solutions show that the simulation results of the new model are basically consistent with the DSMC’s.This theoretical model can been used to simulate the gas flow in the slip and transition region.The program of GDQ is simple and its running cost is low.更多还原