【摘要】 利用非平衡磁控溅射技术在Ti6Al4V合金表面制备SiNO薄膜,对不同氮气流量下SiNO薄膜样品的耐磨性和耐蚀性进行研究。结果表明,SiNO薄膜样品具有优异的耐磨性和耐蚀性能。研究认为影响SiNO薄膜性能的主要因素为薄膜中的氮原子百分含量及化合物存在状态。更多还原

【Abstract】 The SiNO film has been deposited by unbalance magnetron sputttering(UBMS) on the substrate of Ti6Al4V alloy at different N2 gas flow rate.The wear-resistance and anticorrosion properties were studied.The results show that the samples coating with SiNO film have perfect wear-resistance and anticorrosion properties.It is suggested that the N atom content and the compound exist statement significantly affects the properties of the SiNO films.更多还原