【摘要】 采用射频磁控溅射的方法,在玻璃基片上制备了不同Ag层厚度的[Ag/FePt 2nm]10多层薄膜,经550℃真空热处理后,得到L10有序结构的FePt薄膜。实验结果显示,FePt单层薄膜经550℃退火30min后其易磁化轴处于垂直方向和面内方向之间,而550℃退火60min后其易磁化轴处于垂直于膜面方向,垂直矫顽力和面内矫顽力分别为634和302kA/m;真空退火后[Ag/FePt]10多层膜表现为面内磁晶各向异性,550℃退火60min后[Ag 2.8nm/FePt 2nm]10多层薄膜垂直矫顽力和面内矫顽力分别为309和778kA/m,并且随着Ag层的加入,部分FePt颗粒已经被Ag原子隔开了,颗粒之间的交换耦合作用变弱了。更多还原

【Abstract】 The [Ag/FePt]10 multilayer films with different Ag thickness were deposited by RF magnetron sputtering on glass substrates,and the L10-FePt films were obtained after the as-deposited samples were subjected to vacuum annealing with different annealed time.Results show that after annealed at 550℃ for 30min the easy axis of the FePt 20nm single layer film for magnetization was distributed between the film normal and the film plane,hower after annealed at 550℃ for 60min,the FePt 20nm single layer film exhibited a high perpendicular coercivity of 634kA/m and a low in-plane coercivity of 302kA/m,which suggests that the film exhibited a high perpendicular anisotropy.After annealed at 550℃ for 60min,[Ag/FePt]10 multilayer films exhibited a high in-plane anisotropy,and the[Ag 2.8nm/FePt 2nm]10 film exhibited a low perpendicular coercivity of 309kA/m and a high in-plane coercivity of 778kA/m.During the annealing the Ag atoms diffused into the FePt fims,the coupling effect between the FePt grains was reduced.更多还原