【摘要】 综述了近些年来国内外半导体检测的光学技术研究的最新进展。重点阐述了基于光声光热效应的半导体检测技术的最新发展动态,其中分别对光热偏转(PTD)、光热调制反射(PMTR)、光热辐射(PTR)、光生载流子辐射(PCR)进行了详细介绍,最后提出了半导体检测技术的发展方向。更多还原

【Abstract】 The latest progress of the photo-thermal technique used to measure semiconductor properties is reviewed.The several methods based on the photothermal effects,such as photothermal deflection,photomodulated thermoreflectance,photothermal radiometry,and photo-carrier radiometry,which are applied to measure semiconductor properties are discussed.The development direction of semiconductor technology is prospected更多还原