【摘要】 对MEMS中应用广泛的静电微泵进行有限元建模分析.对于涉及多能量域下多场耦合的静电微泵建模,在仿真过程中进行了合理简化.其中在静态分析中,利用圆型薄板的小挠度变形理论和微机电系统中的静电力驱动理论来模拟静电—结构耦合过程;在泵膜的模态分析、谐响应分析以及非线性瞬态分析中,把腔内的流体当作附加质量作用在泵膜上,近似代替流场对泵膜的影响,从而减小计算量,提高了仿真效率.更多还原

【Abstract】 Electrostatic micro-pump based on MEMS is modeled by FEA.The modeling of coupled-field electrostatic micro-pump involved in multi-physics is reasonably simplified in simulation.In static analysis,small deflection theory of circular plate and electrostatic actuating theory are adopted to simulate electrostatic-structural coupled process.In modal analysis,harmonic response analysis and nonlinear transient dynamic analysis of pump membrane,the fluid in the pump is regarded as an additional mass acting on the pump membrane to approximately substitute the effect of fluid field on pump membrane,which reduces the amount of calculation and improves simulation efficiency.更多还原