【摘要】 本文采用脉冲激光沉积法于不同沉积温度与衬底制备了一系列的La0.05Sr0.95TiO3(LSTO)单晶透明导电薄膜.实验主要研究了高温高氧压条件下沉积的LSTO薄膜的结构及电、光学性质.它们具有良好的外延结构,表现出很好的透明、导电性质.对电阻率拟合发现其导电机制符合电子-电子散射机制.由于制备条件与其它多种钙钛矿型氧化物薄膜一致,可广泛集成应用.用其作为电极所制备的PbZr0.52Ti0.48O3(PZT)外延铁电电容器,具有很好的电滞回线和透光性.更多还原

【Abstract】 Transparent and conductive oxide films with the perovskite-type structure,La0.05Sr0.95TiO3(LSTO),have been grown by the pulsed laser deposition method.It was revealed that the films grown at high oxygen pressure show high single-crystallinity with the perovskite structure,and remarkably,these films are both electrically conductive and visually transparent in the visible range. The growth parameters are compatible with those for some other perovskite films,indicating a potential for transparent devices. The LSTO films have been employed as electrodes for the fabrication of epitaxial PbZr0.52Ti0.48O3(PZT) ferroelectric capacitors,showing square polarization-electric field hysteresis loops ,improved fatigue resistance,and good optical transparency.更多还原