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TiO2薄膜溶胶过程影响因素分析与表征

Analysis of Process Influence Factor of Sol and Characterization of TiO2 Thin Film

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【作者】 吕开云许文苑

【Author】 Lv Kaiyun 1,2,Xu Wenyuan 1,2 (1. China University of Mining and Technology,Beijing 100083,China) (2. East China Institute of Technology,Fuzhou 344000,China)

【机构】 中国矿业大学东华理工大学

【摘要】 稳定性是表征溶胶质量的重要指标,通过溶胶的粘度可以直接表征。以钛酸四丁酯,无水乙醇,乙酰丙酮(Acac),冰乙酸为原料,采用溶胶-凝胶法制备纳米TiO2薄膜,跟踪测量溶胶粘度随时间的变化规律,粘度合适且长期稳定的溶胶适合于制备高质量的薄膜。讨论溶胶各组分的配比与溶胶稳定性的关系。结果表明,影响胶化时间和溶胶粘度的主要因素为去离子水、乙酰丙酮、冰乙酸和乙醇的用量;制备粘度合适且长期稳定的溶胶最佳配比(摩尔比)为钛酸四丁酯:无水乙醇:水:乙酰丙酮:冰乙酸=1:30:3:1.5:1.5。利用SEM、UV-vis、XRD等对薄膜样品的结构、形貌与性能进行表征。

【Abstract】 As the key index of the sol quality,the stability can be characterized by the viscosity of sols. Nano TiO2 thin film was prepared by sol-gol method from tetrabutyl titanate,absolute alcohol,acetylacetone and glacial acetic acid and the viscosity change of sols were tracked and measured. The sols possessing suitable and stabilizing viscosity were fit to prepare the high-quality films. The relationship between ratios of each components and the stability of sols were discussed. The results indicated that the principal factors influencing the gel time and the sol viscosity were the dosage of absolute alcohol,acetylacetone,deionized water and glacial acetic acid. The optimal ratio to prepare the sols possessing suitable and stabilizing viscosity was as as follows:n(tetrabutyl titanate):n(absolute alcohol):n(deionized water):n(acetylacetone):n(glacial acetic acid) = 1:30:3:1.5:1.5 (mol ratio ). The film sample was characterized by SEM,UV-vis and XRD.

【关键词】 TiO2溶胶稳定性粘度薄膜
【Key words】 TiO2solstabilityviscosityfilm
  • 【文献出处】 稀有金属材料与工程 ,Rare Metal Materials and Engineering , 编辑部邮箱 ,2009年S2期
  • 【分类号】O614.411
  • 【被引频次】5
  • 【下载频次】197
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