【摘要】 利用磁控溅射法在玻璃衬底上制备了基于柱状ZnO薄膜的Al-ZnO-Al三明治结构的超低阈值电压的压敏电阻。XRD和SEM测试结果表明,该压敏电阻中的ZnO薄膜层为结晶性能良好,并且沿ZnO的(002)晶面择优取向生长的柱状薄膜。I-V测试结果表明,这种由柱状ZnO薄膜构成的压敏电阻阈值电压仅3.2 V,为现有压敏电阻中阈值电压最低的压敏电阻。更多还原

【Abstract】 Ultra-low-threshold thin film varistors based on columnar ZnO thin film of Al-ZnO-Al sandwiched structure have been fabricated by DC magnetron sputtering deposition.X-ray diffraction(XRD) analysis indicates that ZnO thin films have good crystalline quality and were grown in a preferential c-axis(002) orientation.Small angle XRD and SEM analysis shows that the thickness of ZnO thin film is about 200nm,with c-axis oriented columnar structures.I-V characteristics show that the threshold voltage of the varistors is only about 3.2 V,which is the lowest value ever reported.更多还原