【摘要】 用脉冲激光沉积制备了氢化锂薄膜,对薄膜的结构和表面形貌进行了,给出了氢气压和靶基距与沉积速率的关系。运用扫描电镜和X射线衍射仪测试薄膜的性质。测试结果显示,氢气压为10-1mbar时,薄膜表面粗糙且呈现多晶态。对薄膜粗糙度与氢气压的关系进行了讨论。更多还原

【Abstract】 We have deposited lithium hydride(LiH)films by pulsed laser deposition,and have investigated structure and surface morphology of the films.The influence of hydrogen-gas pressure and substrate-target distance on the deposition rate have been given.The film properties have been characterized by scanning electron miscroscopy(SEM)and X-ray diffraction(XRD).The scanning electron miscroscopy and X-ray diffraction spectra show surface of films are generally rough and films deposited in the presence of a gas pressure(10-1mbar of H2)are polycrystalline respectively.The origin of this roughness and the pressure of hydrogen on the structural have been discussed.更多还原