【摘要】 以普通玻璃载玻片为衬底,采用溶胶-凝胶工艺成功地制备出沿(002)晶面择优取向生长的ZAO薄膜。用XRD、SEM、紫外-可见光分光光度计和四探针电阻测试仪进行了结构和性能分析,研究了掺Al3+浓度、镀膜层数和退火温度对ZAO薄膜的晶体结构、形貌及光电性能的影响。当掺杂浓度为1%(原子分数)、镀膜层数为12层、在氩气气氛下经过600℃退火时,得到电阻率为1.37×10-2Ω.cm、可见光范围内平均透射率超过90%的ZAO薄膜。更多还原

【Abstract】 The transparent and conductive ZAO films with strong preferred orientation growth along the(002) plane are prepared on glass substrates by the sol-gel process.The effects of Al3+ concentration,number of layers and annealing temperature on the microstructure,surface morphology,optical and electrical properties of the films are investigated by XRD,SEM,UV/VIS spectrometer,and four-point probe method.The average optical transmittance of the films is more than 90% in the visible light region and the electrical resistivity is as low as 1.37×10-2Ω·cm when the Al3+ doping concentration is 1at%,the number of layers is 12,and the annealing temperature is 600℃ in argon atmosphere.更多还原