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硅电容差压传感器批量测试工装夹具的设计
Design of frock clamp for batch test of Si-capacitive differential pressure sensor
【摘要】 针对硅电容差压传感器测试项目,达到对被测传感器实现批量、快速、连续的测试要求,设计了硅电容差压传感器测试工装夹具,并对其进行了有限元受力分析,充分证明了夹具的设计满足了测试过程对夹具的材料,密封性、轻便性以及各部分结构中心对准等的要求。
【Abstract】 In order to meet the requests of Si-capacitive differential pressure sensor for fast,continuous batch test ,a frock clamp is designed in this paper. The design is analyzed by finite element analysis method and the results prove that the design can meet the requests for lamp material ,airtightness,handiness and alignment of every part configuration centers in the course of test。
【关键词】 硅电容差压传感器;
测试装置;
工装夹具;
【Key words】 Si-capacitive differential pressure sensor; test equipment; frock clamp;
【Key words】 Si-capacitive differential pressure sensor; test equipment; frock clamp;
- 【文献出处】 传感器世界 ,Sensor World , 编辑部邮箱 ,2009年07期
- 【分类号】TP212.1
- 【下载频次】144