【摘要】 为提高谐振式微加速度计的灵敏度和精确度,设计了放大惯性力的柔性微杠杆机构,从理论上分析了微杠杆机构的不对称误差,设计了误差消除机构;经有限元仿真分析证明:所设计的机构能有效减小由不对称误差产生的横向力,有效地消除了放大机构不对称误差对谐振器的影响。分析了形状加工误差对加速度计性能的影响,为制作高灵敏度和高精确度加速度计提供了保障。更多还原

【Abstract】 In order to improve the sensitivity and accuracy of the resonant micro accelerometer,a flexible micro leverage for amplifying the inertia force and a structure for eliminating the errors are designed.These are based on analyzing the dissymmetry error in theory.The structure can decrease the lateral force brought by dissymmetrical structure in a great extent,and it is confirmed by FEM.It’s also analyzed that the effect of the sensitivity is brought by the form errors,so it can insure the fabrication of the accelerometer with higher sensitivity and accuracy.更多还原