【摘要】 静电作用在在平行板电容器上会产生等效静电负刚度,介绍了基于静电刚度的谐振式微加速度计设计原理,建立了其动力学模型。根据检测电压的约束条件,求解了其可行范围。同时分析了检测电压对系统灵敏度、可靠性和量程及输出电压的影响。分析结果表明:检测电压越大,灵敏度越大,但可靠性和量程会相应减少,反之亦然;直流检测电压的存在使得输出电压不受检测电容并行的寄生电容影响。理论分析结果为谐振式微传感器的系统设计提供了重要依据。更多还原

【Abstract】 According to the principle of the parallel plate capacitor with electrostatic occurs the electrostatic negative stiffness.A new type resonant micro-accelerometer is designed based on electrostatic stiffness.A dynamic model was built for the micro-accelerometer.The analytical result demonstrated the linear relationship between the frequency and acceleration.The sensing voltage range was also computed under the restriction.Subsequently,the influence of the sensing voltage for the sensitivity measurement range and output voltage was discussed.The result shows that the sensitivity non-linearly increasing with the sensing voltage increasing,but decreasing for the reliability.The output voltage is un-related to the parasitic capacitor with the existing of the DC sensing voltage.The all result is benefit to the novel type micro-accelerometer design.更多还原