【摘要】 提出通过改变溅射气压获得倾斜于C轴的AlN薄膜的制备方法,探讨了倾斜AlN薄膜的生长机理。以3对交替沉积的Ti—Mo金属层为布拉格声学反射层,采用MEMS工艺制备了基于倾斜AlN薄膜的、以剪切模式振动的体声波液体传感器,并对器件的S11参数进行测试分析,得到传感器的中心频率为0.78GHz,表明该器件在生物液相检测领域具有一定的应用前景。更多还原

【Abstract】 C-axis inclined AlN films were prepared by changing the sputtering pressure and the mechanism of the c-axis inclined AlN films was discussed.The Ti-Mo alternative six layers were applied as Bragg reflector in thin film bulk acoustic wave resonator.The shear mode liquid sensor based on c-axis inclined AlN film was implemented adopting MEMS process and the characteristic of the device was tested.The sensor shows resonance frequency of 0.78GHz and good application prospect.更多还原