【摘要】 在器件结构上结合了温差式和风速计式两种检测原理,设计并制造了一种新型结构的MEMS热式流量计。在对温差式流量计的灵敏度、量程等特性进行了有限元仿真的基础上,优化设计了器件结构。同时,提出了一种利用Matlab/Simu-link时域仿真实现热源控制电路设计的方法。采用MEMS微加工技术研制了新型结构的热式流量计。测试结果表明该新设计比传统MEMS热式流量计灵敏度提高近4倍。更多还原

【Abstract】 A new structure MEMS thermal flow sensor combining two principles of temperature-difference and anemometer is designed and manufactured.A Finite Element Analysis of temperature-difference flow sensor is first performed to observe the sensitivity and range.The new design is based on the FEA results.A Matlab/Simulink modeling is then conducted to help design the new sensor and its control circuit.The sensor is manufactured by micromachining technology and finally tested,which is proved to be almost 4 times sensitive than traditional MEMS flow sensor.更多还原