【摘要】 为简化谐振式微机械压力传感器的制备工艺,提出了一种采用扩散硅作为谐振梁的压力传感器,并采用电磁激励实现传感器的闭环控制。实验中发现:由于采用扩散硅材料,传感器受到较为严重的同频干扰影响,因此,消除传感器的同频干扰成为需要解决的一个主要问题。通过对采用扩散硅作为谐振梁的压力传感器微结构进行分析,建立了传感器主要噪声来源同频干扰的等效电路模型,据此提出一种新的不对称双端激励解决方法。实验结果表明,该方法可有效地降低传感器的同频干扰,传感器的信噪比由1.53提高至35,为传感器闭环激励和检测提供了有效的手段。更多还原

【Abstract】 The processes to accomplish the resonant micro-machined pressure sensor are more difficult and complex so that the sensor was applied to limited fields.To simplify the processes for this kind of pressure sensor,a novel microstructure pressure sensor with the diffused silicon as the resonant beam was proposed and the electromagnetic excitation was applied to realize the close-looped control for the sensor.It is founded that the sensor was affected by the high co-channel interference during the close-looped control testing.So how to eliminate the co-channel interference is the main problem for the sensor.Therefore,the microstructure of the micro-machined pressure sensor was analyzed at first,and then the equivalent circuit model of the main noise source co-channel interference was brought up,finally a novel measure with nonsymmetrical excitation was proposed.Experiments show that this measure can eliminate the co-channel interference of the sensor and the S/N ratio is improved from 1.53 to 35,which provide the effective ways to close-looped excitation and detection for the sensor.更多还原