【摘要】 根据双端固定音叉谐振器的动力学原理,建立了其参数模型。该模型基于MAST语言,包含几个子模型,模型有利于验证外围电路和减少计算时间。对于工作谐振模态频率的求解,解析计算和有限元仿真结果一致(相对误差小于1%)。通过模态分析和结构参数敏感性分析提出合理的选择参数可以使工作模态频率远离高阶模态频率,减少音叉梁固接端的弹性系数有利于抑制低阶模态的扰动。结构参数敏感性分析表明工作频率随音叉梁长度增大而减小,随其宽度的减小而增大,结构厚度对频率不产生影响。更多还原

【Abstract】 According to the description of the dynamic of the double-ended tuning fork micro-resonators,the system level universal parameter model is built.The model is a micro model consisting of some sub-blocks based on MAST langue.It can verify the ability of the peripheral circuit and decrease computational cost obviously.The error between analytic result and simulation is acceptable(<1%).Appropriate parameter value is chosen based on mode analysis and structure sensitivity analysis so that the work resonant frequency can be far from the higher order resonant frequency.Making use of the decreasing spring of the joint beam and symmetry electrode can restrain the lower order perturbation.It is discovered that the work resonant frequency lessens slightly as the length of the DETF beam increases,but it is apposite from the variation of the width of the comb.The height of the DETF beam is unrelated to the work resonant frequency.更多还原