【摘要】 研制一种三叠片型压电双晶片驱动器,上下两层为压电陶瓷材料PZT-5H,中间弹性层为铍青铜。利用激光测试仪LC-2400A及LV-1610对压电弯曲元件的输出位移、位移滞环、蠕变量及基频等特性进行实验测试。通过实验,确定压电弯曲元件的弹性层及压电晶片的厚度对其特性的影响,分析影响压电弯曲元件性能的因素。更多还原

【Abstract】 A piezoelectric bender with trilayer structure was fabricated.Piezoelectric ceramics PZT-5H were used as piezoelectric layers on both sides,and Be-Cu as the elastic interlayer.The characteristics of piezoelectric bender,including the output displacement,the displacement hysteresis loop,creep and the basic frequency were investigated by laser distance measuring instrument LC-2400A and LV-1610.The relations between the thickness of piezoelectric layers and elastic layer and its static and dynamic characteristics were analyzed.更多还原