【摘要】 利用射频磁控溅射法以ZnO:Al2O3陶瓷靶材为源在丙纶非织造布上制备了AZO薄膜.采用扫描电镜(SEM)分析溅射时间对薄膜微结构的影响,结合能谱分析仪(EDX)对薄膜成分进行分析表征,分析探讨了在丙纶非织造布上溅射沉积纳米薄膜与基材的结合机理.结果表明:随着溅射时间的延长,薄膜的均匀性致密性越来越好;溅射得到的纳米薄膜元素的特征峰明显,纯度高;薄膜与基材之间结合是物理、化学等多种力共同作用的结果.更多还原

【Abstract】 ZnO: Al2O3 ceramic target has been deposited on PP nonwoven substrates by RF magnetron sputtering in the preparation of AZO film.Using scanning electron microscopy(SEM) analysis of the influence of sputtering time on micro-film structure and spectrum analyzer(EDX) analysis of the film composition characterization.The paper studied and discussed the combining mechanism of the nano-thin film sputtering and the substrate on the polypropylene non-woven fabric.The results showed that with the sputtering time,the film uniformity and density are getting better and better,the nano-thin film sputtering elements possess obvious characteristics of the peak and high-purity;the combination of film and substrate is due to the comprehensive effects of the physical and chemical forces.更多还原