【摘要】 采用中频反应磁控溅射方法和线性阳极层离子源实现了TiO2薄膜在线制备和在线离子束后处理。通过对薄膜光学性质的研究,发现氧离子束后处理对提高薄膜折射率,降低薄膜吸收率具有明显效果。为工业生产中,薄膜的在线制备及后处理提供了切实可行的手段。更多还原

【Abstract】 Ion beam post-treatments were carried out online to improve the optical properties of as-deposited TiO2 thin films deposited by MF reactive magnetron sputtering.The ion beams were generated by a linear anode layer ion source.After ion beam post-treatments,it was found that the refractive index increases and optical absorbency decreases both obviously.The post-treatment thus provides an efficient way for improving the optical properties of TiO2 thin films.更多还原