【摘要】 根据IC制造、超精密加工等行业的需求,研发了能够用于超精密定位系统的两维大范围、宽平台精密定位系统。根据宽平台高速运动的要求,对大跨度平台的受力变形进行了理论分析,并对系统结构的静态和动态特性进行了有限元分析。在理论研究的基础上研发了精密定位系统。所开发的系统能够保证在设计载荷下,对于承载面积为250mm×250mm的承载台上任意一点都能够在300mm×300mm范围内任意点进行精密定位。更多还原

【Abstract】 The precision positioning system with large-scale and two-dimension worktable, which is applied in ultra-precision positioning, is developed based on the requirements of IC manufacturing and ultra-precision machining. As the high speed of the wide worktable is required, the theory analysis on the force deformation of the big-span worktable structure is processed; the finite element analysis on the static and dynamic characteristic of the worktable structure is carried on. And then the precision positioning system with wide worktable on the basis of theory study is achieved. The developed system has realized precision positioning at each point in the 300 mm×300 mm range on the 250 mm×250 mm worktable under the design load.更多还原