【摘要】 为提高硅微隧道式加速度计的灵敏度,必须设计出高灵敏度的输出和反馈控制电路。在电路设计中,通过采用行之有效的措施来降低噪声和干扰可达到提高灵敏度的目的,如:将隧道式加速度计敏感单元的参考地设置为同一的大地;采用能抑制隧道式加速度计敏感单元和半导体器件所产生的1/f噪声的低噪声运算放大器;在电压信号放大过程中,尽量抑制干扰和噪声;且在电压反馈电路设计中,保护敏感单元不受损坏等措施。测试结果为标定因数1.2659V/g,其非线性度小于1%,可见在提高线性度的基础上也提高了灵敏度。更多还原

【Abstract】 To improve the sensitivity of silicon-micro tunneling accelerometer, it is necessary to design a circuit with high-sensitivity output and feedback control. The paper introduced effective ways to reduce the noise and interference, for example, setting the sensitive unit’s reference ground as the earth; using the low noise operational amplifier to reject the 1/f noise which is source of the tunneling accelerometer and the semiconductor device; rejecting the noise and interference as possible in the process of signal amplifying; designing the protected circuit in the feedback circuit. The test results show that the calibration factor is 1.2659 V/g, and the non-linearity is less than 1%. This proves that these ways can improve both the linearity and the sensitivity.更多还原