【摘要】 高分辨率步进扫描投影光刻机中的精密双层气浮直线电机采用气浮轴承支撑,实现亚微米级定位的高速高精运动。考虑其气固耦合特性以及对运动精度产生的影响,通过有限元的方法建立了精密双层气浮直线电机的有限元模型。在该模型的基础上,应用模态叠加法分析了该系统在各种条件下的动力学响应,得到了在X、Y、Z三个方向的加速度响应曲线;同时,借助实验模态方法,验证了该系统动态响应,从而得到了该系统的谐振频率。仿真计算结果和模态实验结果的偏差小于10%,证明了该模型是正确有效的,为下一步的动态优化和控制设计打下基础。更多还原

【Abstract】 The precision double linear motor in high resolution step & scan projection-lithography machine utilized the air-bearings to achieve highspeed and high-precision motion with submicron positioning accuracy.With respect to the effect of the characteristics of gas-solid coupling on motion accuracy of the linear motor,a model of the precision linear motor was established by finite element method.Based on the model,the dynamic response was analyzed by the modal method under different conditions,which the acceleration response curves were obtained in X,Y,Z direction respectively.And the dynamic response was proved with experimental modal,which the natural frequency was obtained.The results of simulation are in agreement with those of the experiment and the deviation is 10% below,thus the model is reasonable and feasible.It is helpful to dynamic optimization design and control design of the precision double linear motor with air-bearing in the future work.更多还原