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In situ photoemission study of interface and film formation during epitaxial growth of Er2O3 film on Si（001） substrate

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【作者】 朱燕艳； 方泽波； 刘永生； 廖灿； 陈圣；

【Author】 ZHU Yanyan, FANG Zebo LIU Yongsheng , LIAO Can , CHEN Sheng (1. Department of Mathematics and Physics, Shanghai University of Electric Power, Shanghai 200090, China; 2. Surface Physics Laboratory (National Key Laboratory), Fudan University, Shanghai 200433, China)

【机构】 Department of Mathematics and Physics, Shanghai University of Electric Power； Surface Physics Laboratory (National Key Laboratory), Fudan University；

【摘要】 <正>Synchrotron radiation photoemission spectroscopy was used to study the formation process of Er2O3/Si(001) interface and film during epitaxial growth on Si. A shift in the O core-level binding energy was found accompanied by a shift in the Er2O3 valence band maxi-mum. This shift depended on the oxide layer thickness and interfacial structure. An interfacial layer was observed at the initial growth of Er2O3 film on Si, which was supposed to be attributed to the effect of Er atom catalytic oxidation effect.

【Abstract】 Synchrotron radiation photoemission spectroscopy was used to study the formation process of Er2O3/Si(001) interface and film during epitaxial growth on Si. A shift in the O core-level binding energy was found accompanied by a shift in the Er2O3 valence band maxi-mum. This shift depended on the oxide layer thickness and interfacial structure. An interfacial layer was observed at the initial growth of Er2O3 film on Si, which was supposed to be attributed to the effect of Er atom catalytic oxidation effect.

【关键词】 high-κ oxides； surface and interface chemistry； rare earths；
【Key words】 high-κ oxides； surface and interface chemistry； rare earths；
【基金】 supported by the Special Project of Shanghai Nano Technology (0852nm02400 and 0752nm012);Shaoxing Science and Technology Commission (2007A21015);Shanghai Rising-Star Program (07QA14026);the National Natural Science Foundation of China (10804072);the Key Fundamental Project of Shanghai (08JC1410400);Shanghai Education Commission (07zz143)
  • 【文献出处】 Journal of Rare Earths ,稀土学报(英文版) , 编辑部邮箱 ,2008年06期
  • 【分类号】TB304
  • 【被引频次】3
  • 【下载频次】36
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