【摘要】 采用微波PCVD方法制备出直径50mm膜厚300μm的大尺寸透明自支撑金刚石膜。在甲烷体积分数2%的条件下制备的透明自支撑金刚石膜经过两面抛光后在500cm-1~4000cm-1红外波段范围内红外透过率达到70%,但是其生长速率只有1μm/h~2μm/h。在体积分数4%甲烷浓度下制备的自支撑透明金刚石膜,其生长速率达到7μm/h~8μm/h,经过两面抛光之后膜厚为260μm的金刚石膜的在500cm-1~4000cm-1红外波段范围内红外透过率达到60%左右,而且膜中心和边缘区的红外透过率基本相同。这些结果为大尺寸金刚石厚膜在红外窗口上的实际应用奠定了基础。更多还原

【Abstract】 Large-sized free-standing transparent diamond films of 50 mm diameter and 300 μm thickness were prepared by microwave plasma chemical vapor deposition(MWPCVD).The growth rate of the diamond film was only 1-2 μm/h when the diamond film was grown at a methane concentration of 2%,and the infrared(IR) transmittance reached 70% in the range of 500-4 000 cm-1 after the film was polished on both sides.A high growth rate of 7-8 μm/h was achieved for the film grown at a methane concentration of 4%.The thickness of the film was 260 μm after it was polished on both sides and its IR transmittance in the range of 500-4 000 cm-1 reached about 60%.Meanwhile,the IR transmittance was almost the same in the central and fringe regions.These results imply a promising application of large-sized thick diamond films in IR windows.更多还原