【摘要】 扫描控制系统是纳米测量系统的重要组成部分,其性能影响整个系统的测量精度。本文介绍了二维精密扫描台的设计——柔性铰链与压电控制结合的方式,综述了BP神经网络的概念,并通过BP神经网络建模,设计了扫描台的控制方法,最后介绍了试验设备,并通过试验测试得到了最佳控制参数,验证得到建模控制方案与实际位移相吻合。更多还原

【Abstract】 The scanning system is one of the most important parts of the nano-measuring system,its capability influences on the main performance of the system.This paper introduces the structure of a 2-dimensions precise scanning stage that means the method mixed flexible hinge and piezoelectric control.It also gives a summary of BP neural network concepts,and the princi- ple of BP neural network method.The paper makes a modeling using BP neural network method to realize the control on scan- ner.The experiment presented in the end shows that the model- ing matches the actual results perfectly.更多还原