【摘要】 探讨了包括标准LIGA技术,UV-LIGA技术在内的MEMS引信部件的制作方法,给出了使用现有LIGA技术加工MEMS引信部件的流程、存在的问题以及解决方案,对MEMS引信设计提出了基于工艺制作的要求和思考。更多还原

【Abstract】 The manufacture methods of MEMS fuze devices,including standard LIGA technology and UV-LIGA technology,are discribed,and the standard LIGA technics flow chart is given.Based on the manufacture experience,the domestic LIGA progress flow chart and the typical states are given;the problems existing in LIGA progress are discussed and demands on LIGA progress are set to the MEMS fuze designer to promote the application of MEMS technology in fuze.更多还原