【摘要】 采用磁控溅射法制备了纳米硅颗粒镶嵌氧化硅薄膜,测试了其光致发光谱,发现其发光强度不仅是纳米硅晶粒尺寸的函数,而且与纳米硅晶粒和二氧化硅间的比例关系有关.实验证实,钉扎现象是由于存在于纳米硅晶粒与非晶态外部介质界面间的发光中心所致,发光中心在界面处的分布并不均匀.更多还原

【Abstract】 Si-containing silicon oxide films is prepared by magnetron sputtering,and its photoluminescence is tested.The results show that the intension is related with the crystal grain dimension and the proportion of crystal grain and silicon oxide.It is also approved that photoluminescence pinning are caused by the illuminant centre existing in the interface,and the distribution of defect shapes are asymmetrical.更多还原