【摘要】 针对线结构光扫描测头多项式拟合测量模型的系统误差问题,提出了一套用于该测头系统误差提取与补偿的方法.该方法通过在不同高度测量固定直线来提取不同景深位置的测量误差,并从中分离出测头在不同测量高度存在的系统误差,同时进行高度方向上的误差补偿.然后,利用标定结果以及高度方向的误差补偿点阵,将由标定成像网格点阵计算得到的空间点阵与实际标定空间网格点阵进行对比,进一步提取高度误差补偿后的测量结果存在的误差值,从而进行二次补偿与修正.实验表明,该方法可以有效扩大测量景深(达到150 mm),并且在采用步进电机开环驱动的普通机械精度工作台(单轴定位精度为15μm)上测量时,能够保证在较大景深范围内具有较好的测量精度(±50μm).更多还原

【Abstract】 For polynomial fitting measuring model of a linear structured light scanning probe,the extraction and compensation methods for systematic errors of the probe are presented.By measuring fixed lines at different height,the proposed method extracts the measuring errors in positions with different depth of the field.And systematic errors of the probe at different measuring height are separated from the extracted errors,and the first error compensation in the height direction can be implemented.According to the calibrating result and error compensation lattice in the height direction,a comparison is made between the spatial lattice obtained by calibrating image grid lattice and the practical calibrating spatial grid lattice.The remaining errors of measuring results after compensation in the height direction are further extracted.And the second error compensation and correction are implemented simultaneously.The experimental results show that the measuring depth of field can be expanded effectively and reached 150 mm with the presented method.A high accuracy(±50 μm) can be ensured in a large range of depth of field on common mechanical accuracy platforms(single axis positioning accuracy:15 μm) driven by step motor with open-loop style.更多还原