【摘要】 利用卢瑟福沟道背散射技术结合表面的原子力显微分析,对注He的铝镁尖晶石晶体的晶格损伤及表面形变随退火温度变化的关系进行了研究.结果表明,不同注入剂量的样品中晶格损伤和表面形变表现出显著不同的退火行为.分析认为造成损伤演化的这种差异与注入的He原子在晶体中不同的聚集状态有关.更多还原

【Abstract】 Evolution of damage in single-crystalline magnesium-aluminate spinel implanted with helium ions was studied using Rutherford backscattering technique in channeling geometry combined with surface investigation by atomic force microscopy.It was found that the damage induced by helium-ion implantation in the crystal showed significantly different annealing behavior depending on the implantation fluence.The difference in annealing behavior is ascribed to the strong dose dependence of clustering/resolution of helium atoms.更多还原