【摘要】 采用脉冲激光沉积（PLD）技术,在MgO（100）基片上制备了b轴取向的BaTi₂O₅薄膜,研究了基片温度(T_sub)、氧分压（Po₂）等沉积工艺对薄膜结构的影响.结果表明:BaTi₂O₅薄膜的物相及取向性都随基片温度和氧分压的改变而变化,薄膜呈现（710）或（020）取向生长,最佳的PLD沉积条件为T_sub=700℃和Po₂=12.5Pa.在该条件下,BaTi₂O₅薄膜表现出明显的b轴取向,薄膜表面平整光滑,结晶良好,晶粒呈棒状交叉分布,结合紧密.更多还原

【Abstract】 A new kind of b-axis oriented BaTi₂O₅ thin film was prepared on MgO （100） substrates by pulsed laser deposition.The effects of substrate temperature (T_sub) and oxygen partial pressure （Po₂） on the crystal phase and preferred orientation were investigated.The BaTi₂O₅ thin films exhibits （710） or （020） orientation,which depends on the substrate temperature and oxygen partial pressure.On the deposition condition of T_sub=700℃and Po₂=12.5Pa,the b-axis oriented BaTi₂O₅ film is successfully obtained.The film has a dense and smooth surface,showing an elongated granular texture.更多还原