Monte Carlo Simulation of Electron Swarms Parameters in c-C₄F₈/CF₄ Gas Mixtures

【摘要】 The swarm parametes for c-C4F8/CF4 mixtures, including the density-normalized effective ionization coeffcient, drift velocity and mean energy were calculated using Monte-Carlo method with the null collision technique. The overall density-reduced electric field strength could be varied between 150 and 500 Td, while the c-C4F8 content in gas mixtures is varied in the range of 0-100%. The value of the density-normalized effective ionization coeffcient shows a strong dependence on the c-C4F8 content, becoming more electronegative as the content of c-C4F8 is increased. The drift velocity of c-C4F8/CF4 mixtures is more affected by CF4. The calculated limiting field strength for c-C4F8/CF4 mixtures is higher than that of SF6/CF4.更多还原

【Abstract】 The swarm parametes for c-C4F8/CF4 mixtures, including the density-normalized effective ion- ization coeffcient, drift velocity and mean energy were calculated using Monte-Carlo method with the null collision technique. The overall density-reduced electric field strength could be varied between 150 and 500 Td, while the c-C4F8 content in gas mixtures is varied in the range of 0–100%. The value of the density-normalized effective ionization coeffcient shows a strong dependence on the c-C4F8 content, becoming more electronegative as the content of c-C4F8 is increased. The drift velocity of c-C4F8/CF4 mixtures is more affected by CF4. The calculated limiting field strength for c-C4F8/CF4 mixtures is higher than that of SF6/CF4.更多还原