【摘要】 为了对热丝化学气相法沉积金刚石薄膜的工艺进行优化,提出了以有限元法模拟金刚石薄膜沉积系统三维温度场的新方法.在有限元仿真中,分析了温度场中热丝温度、直径、热丝排布、热丝与衬底距离等参数对衬底温度及均匀性的影响.在此基础上,通过热丝化学气相法沉积金刚石薄膜和生长单晶金刚石颗粒的试验验证了仿真结果的正确性.实验和仿真结果一致表明,热丝排布以及热丝与衬底间距离是影响金刚石薄膜沉积温度场的主要因素.更多还原

【Abstract】 In order to optimize the process of diamond coating with hot filament chemical vapor deposition(HFCVD) equipment,a new method by using finite element simulation was proposed to analyze the influences of hot filaments parameters on the uniformity of substrate temperature and temperature field.In addition,the simulation was validated by depositing diamond films and single diamond crystals with HFCVD equipments.The results of the simulation and experiments show that the arrangement of filaments and the distance between filaments and substrate are the key attributes of diamond coating quality.更多还原