【摘要】 采用Sol-Gel法和层层快速退火工艺,通过控制甩膜转速在Pt/Ti/SiO2/Si基片上制备了单层膜厚不同的钙锶铋钛钕(C0.4S0.6NT)铁电薄膜。研究了单层膜厚对于C0.4S0.6NT铁电薄膜的结构及性能的影响。研究结果表明:适当的单层膜厚有利于薄膜在(200)方向的择优取向,有利于薄膜的铁电性能。单层膜厚为60nm时,C0.4S0.6NT薄膜具有优良的铁电性能,2Pr和2Ec分别为24.155μC/cm2、148.412kV/cm,具有较高的应用价值。。更多还原

【Abstract】 Single layer film with different thickness of calcium strontium bismuth titanium neodymium(C0.4S0.6NT)ferroelectric films were prepared on Pt/Ti/SiO2/Si by controlling the rotate speed of spin-coating,using sol-gel method and layered rapid annealing process.Effect of single layer film thickness on structure and properties were studied.The results indicated that suitable single layer film thickness has good effects on the(200) preferred orientation and ferroelectric properties of film.When the single layer thickness is 60nm,ferroelectric properties of C0.4S0.6NT ferroelectric film reaches the best values,the 2Pr and 2Ec values are 24.155μC/cm2 and 148.412kV/cm,respectively.更多还原