【摘要】 综述微尺度热科学的理论建模、实验测试方法及计算机模拟等三方面的研究进展,重点讨论各理论模型的适用条件及优缺点。从线性波尔兹曼传输方程的解得出声子散射热传输方程。体积和重量不断减少的半导体微尺度器件中的非金属薄膜材料传热机理的研究将会促成一些新的工程应用,有可能开辟新的市场,并为有关基础探索提供了崭新的研究手段。更多还原

【Abstract】 The phonon scatter heat transfer equation is obtained from the solution of the linear Boltzman equation.The research progresses of theoretical model,experimentation and computer simulation of Micro-scale Heat Transfer Theory are introduced.The adaptable conditions,merits and defects of every theoretical model are discussed.The study of the nonmetallic film’s heat transfer mechanism in semiconductor micro scale devices whose volume and weight continued reducing will promote the applications of some new projects may open new market,and provides brand-new research methods for the related foundation exploration.更多还原