【摘要】 采用射频磁控溅射方法在高速钢基体上制备WS2-Ag复合薄膜。用能谱(EDS)、X射线衍射(XRD)、扫描电镜(SEM)等对薄膜的成分、组织结构和形貌进行了表征;用划痕仪和球-盘式摩擦仪分别测试薄膜的结合力和大气及真空环境下的摩擦学性能。结果表明,Ag含量为3.23%～5.78%的WS2-Ag复合薄膜具有非晶态结构。Ag的掺入可使WS2薄膜平滑、致密,提高薄膜与基体的结合力,降低薄膜的摩擦因数和摩擦学特性环境敏感性。复合薄膜的耐磨性比纯WS2更加优异,Ag含量5.05%的复合薄膜具有最佳摩擦学性能,其在大气和真空中的磨损率分别为1.06×10-6和0.72×10-6mm3/(N.m)。更多还原

【Abstract】 WS2-Ag composite films were prepared on high-speed steel by radio frequency magnetron sputtering method.The composition,microstructure and morphology of the films were characterized by EDS,XRD and SEM.The adhesion to substrate and tribological performance of the films in atmosphere and vacuum were evaluated by scratch test and ball-on-disk tribometer respectively.The composite films with Ag content 3.23%～5.78% were amorphous.The doping of Ag smoothens and densifies the films,enhances the adhesion to substrate,decreases the friction coefficient and environmental sensitivity of tribological properties.The wear resistance of the composite films is rather better than that of pure WS2,WS2-5.05%Ag composite film has excellent tribological performance,its wear rate in atmosphere and vacuum is 1.06×10-6 and 0.72×10-6 mm3/(N·m)respectively.更多还原