【摘要】 为使激发微波等离子体的腔体设计更便捷并详细了解腔内的电场分布,迫切希望有仿真工具支持。该文介绍了一台环形波导微波等离子体设备,利用一种有限元软件对反应腔内的电场分布和功率密度进行仿真,并运用光电探头和水负载温升法实际测量反应腔内的对应参数。实验结果表明:反应腔内的电场分布、功率密度均与仿真结果大致接近,证实运用此种计算工具对微波等离子体反应腔进行数字化设计是可行的。同时,该软件仿真得到的腔内电场分布,能够为微波等离子体激发过程的研究提供指导。更多还原

【Abstract】 An atmospheric pressure microwave plasma system was developed with a 2.45 GHz magnetron,a 0 to 10 kW adjustable power input and a cavity with a ring waveguide.Experimental tests showed that large volumes of plasma could be successfully generated at atmospheric pressure with helium and argon.This paper describes the system and simulations of the electric of fields and power density inside the cavity using finite element analyses.The simulations results were agreed well with experiments,so the analyses can be used to design microwave plasma devices and to analyze the electrical field distributions in the cavity.更多还原