【摘要】 以锆钛酸铅(PZT)薄膜作为驱动材料,制备了变形镜的微致动器阵列.使用有限元软件对致动器进行了模拟仿真,得到了驱动器上电极尺寸、Si弹性层厚度等参数对致动器性能的影响,获得了最优化的致动器结构.以钙钛矿相的镍酸镧(LNO)作为PZT薄膜在Pt衬底上生长的缓冲层,增强了PZT薄膜的(100)取向,减小了PZT薄膜的内部应力,提高了致动器的驱动性能.最终制备出的1μm厚PZT薄膜驱动的变形镜微致动器,在10 V直流电压的激励下,具有2.0μm的变形量.以PZT薄膜作为驱动材料制备的变形镜微致动器阵列,对变形镜致动器的微型化和系统集成度的提高具有重要意义.更多还原

【Abstract】 Microactuators of deformable mirror were fabricated by micro electro-mechanical system(MEMS) technology using lead zirconate titanate(PZT) thin film as driving material.Finite element model of the microactuator was built to simulate and calculate the optimal parameters including dimension of upper electrode and thickness of silicon layer.Then the optimal microactuator was obtained.With perovskite lanthanum nickel oxide(LNO) as the buffer layer between PZT thin films and Pt substrate,high(100) oriented PZT thin films were obtained and the stress in the films was reduced.Good performance of the microactuators was achieved.Finally the microactuator of deformable mirror driven by 1 μm-thick PZT thin film was fabricated and its deformation was 2.0 μm under a 10 V DC voltage excitation.Fabrication of microactuator with PZT thin film is significant for the miniature of microactuator of deformable mirror and integration of adaptive optical system.更多还原