【摘要】 为了避免微加速度计在加工过程中,由于湿法腐蚀的各向异性而造成的凸角处产生削角现象,必须根据各个晶向的腐蚀快慢特性和腐蚀深度的要求,在腐蚀开始前设计好补偿的掩膜图形,使之在特定的腐蚀时间后显现出理想的凸角形状.以一种梁-质量块结构的加速度计为模型,为了在加工过程中,得到完整的质量块结构,使结构具有更好的对称性,对各种凸角补偿方式进行了研究.利用(100)面硅片各向腐蚀速率的快慢特性和一定的几何知识,计算出各种凸角补偿方式最佳的补偿几何尺寸模型.这样,在设计加速度计制造工艺时,就可以直接利用这些尺寸模型,得到最佳的结构.更多还原

【Abstract】 To avoid the under-cutting phenomenon caused by the anisotropy of wet etching technology in the machining process of micro accelerometer,mask patterns for compensation should be designed according to the requirement of etching speed and depth before corrosion,then perfect shape of convex corner can be obtained after a given etching time.To acquire intact mass structure with better symmetry,various methods of convex corner compensation were studied based on a sort of accelerometer of beam-mass structure.The optimal geometrical module of each compensation method was achieved by using characteristics of etching velocity on silicon(100) and geometry knowledge.Then these modules can be used to obtain optimal structure in the design of new manufacturing technology of accelerometer.更多还原