【摘要】 分析了平面微弹簧在某种MEMS引信安全保险机构中的作用,利用力学能量法推导出了"L型"、"S型"及"W型"微弹簧弹性系数计算公式,解决了目前相关MEMS弹簧没有成熟设计公式的问题。在理论推导过程中,利用有限元仿真软件ANSYS的仿真结果对其进行完善,提高了弹性系数计算公式的精度。结果表明,完善后的弹性系数计算公式更为准确,其中"L型"微弹簧的公式平均误差低于1%,精度较相关文献提高约一个数量级。更多还原

【Abstract】 The functions of planar micro-spring used in a micro electro mechanical system(MEMS) fuse safety and arming mechanism are analyzed.The elastic coefficient formulas for L-shaped,S-shaped and W-shaped micro-springs are derived respectively by using mechanical energy method.The problem of lacking effective formulas in the design of micro-springs is solved.In the derivation,the coefficient formulas are analyzed by comparison with the results of ANSYS simulation.The results show that the optimized formulas are more accurate.The average error of L-shaped micro-spring’s elastic coefficient formula is less than 1%,and the accuracy is increased by about one order compared with the relevant reference.更多还原