【摘要】 利用非平衡磁控溅射方法在Ti811合金表面制备MoS2/Ti复合薄膜,研究薄膜的成分、膜-基结合强度和显微硬度,以及MoS2/Ti复合薄膜对Ti811合金基材在350℃中的摩擦磨损性能和微动疲劳性能的影响.结果表明:利用非平衡磁控溅射技术可以获得致密度高、晶粒细化、孔隙率低和膜-基结合强度高的MoS2/Ti复合薄膜;MoS2/Ti复合薄膜对Ti811合金表面具有良好的减摩润滑作用,能够显著改善Ti811合金在350℃下的摩擦磨损性能和微动疲劳性能;经喷丸强化处理后再进行非平衡磁控溅射MoS2/Ti复合薄膜,可以使Ti811合金在350℃下的耐微动疲劳性能优于MoS2/Ti薄膜,但不及喷丸强化处理的结果.这是由于非平衡磁控溅射工艺过程降低了喷丸强化层的残余压应力.更多还原

【Abstract】 MoS2/Ti composite films were prepared on Ti811 titanium alloy substrate by unbalanced magnetron sputtering (UBMS) method. The composition, bonding strength and hardness of the films were measured. The effect of the composite films on the tribological properties and fretting fatigue of Ti811 titanium alloy at 350 ℃ were investigated. The results indicate that the MoS2/Ti composite films prepared by UBMS technique had high density, small grain size, low void radio, and high bonding strength. The MoS2/Ti composite films improved the resistance of wear and fretting fatigue of the Ti alloy due to excellent lubricating properties of the films at 350 ℃. The UBMS films on the titanium alloy after shot peening exhibited better fretting fatigue resistance than the UBMS films without shot peening did. The compressive residual stress on the shot peened surface relaxed during preparing the MoS2/Ti composite films process, so they exhibited reduced fretting fatigue resistance.更多还原