【摘要】 针对MEMS及半导体制造工艺超高精度的对准要求,论述了在有多维微驱动器定位系统中,应用PID和FUZZY联合控制的方式解决定位中存在的速度调节与系统振荡的矛盾;在一套由光栅、驱动器及激光干涉仪构成的闭环超高精度自对准定位系统中,应用坐标变换方式解决多维定位系统中的干涉现象;以及在实际系统中,采用直线电机与微驱动器联合驱动的硬件构架,并配以上述控制策略,对定位系统进行粗定位和微定位,最终实现步进精度小于10nm,多层压印重复对准精度小于20nm,达到压印光刻为实现0.1μm或更小特征尺寸而要求的30nm对准精度。更多还原

【Abstract】 In this paper, using PID and FUZZY controlling method to resolve confliction between speed adjusting and system vibration, and using conversion of coordinate to resolve the reference in multi-dimension micro-actuator positioning system is discussed. A self-alignment system, which includes gratings, actuators and laser-interferometers, for ultra-precision alignment in step imprint lithography process is used. And the construct of control system is made of linear motors and micro-actuators. At last, the system realizes the needs of 30nm alignment precision for 0.1 m or smaller feature sizes.更多还原