【摘要】 本文采用光栅尺、数据采集卡以及开发的测量软件建立了一个粘片机晶圆传送精度检测系统。该系统通过在运行过程中适当设置采样频率和剔除冗余数据以获得有用的数据,并经过数据处理完成工作台的送片精度测量。更多还原

【Abstract】 This article established a wafer transport precision detecting system of die bonder by adopting raster rule, data acquisition card and testing soft. With setting proper sample frequency in system operation process, removing redundancy data, obtaining available data and data processing, wafer transport precision detecting is achieved.更多还原