【摘要】 微电子机械系统(Micro Electro Mechanical Systems,简称MEMS)是在微电子技术的基础上兴起的一门应用技术,微驱动器是MEMS的重要组成部分。首先阐述了几种新型驱动原理:机械化学驱动、渗透驱动、生物能源驱动、仿生驱动、光致伸缩驱动,接下来介绍了常用驱动技术压电驱动、静电驱动、磁致伸缩驱动和气动驱动的当前研究成果。总结了常用微驱动器的驱动方式及特征。提出了目前研究中存在的主要问题,在此基础上简要分析了微驱动器的发展前景。更多还原

【Abstract】 The Micro Electro Mechanical Systems is an application technique based on the micro-electronics technical foundation,and the microactuators are the important part of the MEMS. The actuating principles of several novel microactuators,including mechanochemical actuator,water-powered osmotic actuator,biologic power actuator,bionic actuator and photostrictive actuator,are presented in detail. The current researching results of piezoelectric actuator,static electric actuator,electromagnetic actuator and pneumatic actuator are introduced. The actuating modes and characteristics of the common microactuators are summarized. At last,the problems in research are presented,and the prospects are analyzed.更多还原