【摘要】 设计了一种平行板电容驱动MEMS扭转疲劳试验装置。通过理论分析和有限元分析两种方法去预测该装置的吸附电压,并将所得结果进行对比,证明两种方法具有一致性。最后通过对比试验结果与理论计算结果证实了该理论分析方法的有效性。同时也就证实了有限元分析方法的有效性。通过有限元分析得到的疲劳试样应力分布情况表明该装置可以达到MEMS疲劳测试所要求的应力水平。更多还原

【Abstract】 A novel MEMS fatigue testing device driven by electrostatic force of parallel plate condenser was proposed. The Pull-in voltage is analyzed by both the theoretical analysis and the FEA methods, and the agreement of the results proved the consistency of two methods. The validity of the theoretical analysis method was proved by comparing its result with experimental result; at the same time, the validity of FEA method was verified as well. The stress distribution of fatigue testing sample gained by means of FEA indicated that the sample stress can achieve the required level for MEMS fatigue testing.更多还原