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不同下电极对Sol-Gel LiTaO₃薄膜性能的影响

Effect of Different Electrodes on the Ferroelectric Properties of Sol-Gel LiTaO₃ Films

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【Author】 DAN Di-di1,ZHANG De-yin1,2,LI Kun1,XIE Tai-bin1,LI Jin-hua1(1.Laboratory of Functional Materials,Jiangsu Polytechnic University,Changzhou 213164,China;2.School of Mechatronics Engineering,University of Electronic Science and Technology,Chengdu 610054)

【机构】江苏工业学院功能材料实验室；江苏工业学院功能材料实验室江苏常州213164；江苏常州213164；电子科技大学机电工程学院；四川成都610054；

【摘要】用醇盐制备了钽酸锂(LiTaO3)溶胶,分别在Pt、ITO、TiN衬底上旋转涂胶成膜。经快速热退火后,用X射线衍射(XRD)测试了膜的结晶取向,用PLC-100铁电材料分析仪测试膜的铁电特性,用TH2818测试薄膜的介电常数及损耗。结果表明,3种衬底上制备出的薄膜在650℃均可达到充分结晶,薄膜的相对介电常数约160;在10 V时,Pt、ITO、TiN下电极上的剩余极化强度分别为8.42,5.21和5.76μC/cm2;在5 V时的漏电分别为2.71×10-7,9.24×10-7和2.19×10-7A/cm2;介电损耗分别为0.02,0.18和0.31。讨论了衬底对薄膜性能影响的原因。更多还原

【Abstract】 LiTaO3 ferroelectrtic thin films were prepared by spin coating Sol-Gel LiTaO3 on the ITO,Pt and TiN substrates.The properties of LiTaO3 films after Rapid Thermal Annealing(RTA) were tested by X-ray Diffraction(XRD) for orientation of crystallization,by Radiant technology PLC-100 for ferroelectric hysteresis loops,the remnant polarization,by TH2818 for dielectric constant and loss.The results show that Sol-Gel LiTaO3 films can crystallize well based on the three substrates above mentioned at 650 ℃.Tested on 5 kHz,the relative dielectric constant and loss LiTaO3 at 5kHz for LiTaO3 films on TiN substrate are about 57.8,0.395 respectively.更多还原