【摘要】 CVD金刚石膜研究已经持续了30余年,但仍然充满活力,新的研究方向不断出现。纳米(和超纳米)金刚石膜、金刚石膜MEMs(微机电系统)和NEMs(纳机电系统)应用、大尺寸CVD金刚石单晶、金刚石膜电化学应用和生物医学应用是当前CVD金刚石膜的研究热点。CVD金刚石膜研究已经进入工业化应用阶段。当前的主要应用市场仍然是工具(摩擦磨损)、高端产品,如热沉、光学、探测器和传感器、SOD、SAW等虽已有产品上市,但市场规模不大。当前阻碍CVD金刚石膜市场发展的主要因素是高昂的制备和加工成本,以及金刚石膜和异质材料的连接技术。可以相信,随着上述问题的逐步解决,CVD金刚石膜的应用市场必将出现一个欣欣向荣的局面。更多还原

【Abstract】 Research in CVD diamond films is still active after almost 30 years of its first emergence in laboratory scale.New research directions(hot spots) continuously come forth,of which the nano crystalline diamond(NCD) and ultra nano crystalline diamond(UNCD) films,diamond based MEMs(micro nano electro-mechanic systems) and NEMs(nano electromechanical systems),large CVD single crystal diamond,electrochemistry and bio-medical applications are most attracting.CVD diamond film technology has already entered the stage of industrial applications.At present,diamond film tools(tribology applications) are the main products in the market.Whilst the high technology products,such as the diamond film heat sinks,optical windows,detectors and sensors,SOD,SAW,etc.,even though they are available in the market,are still small in scale.The main problem for large scale market use of CVD diamond film products are:the rather high cost in preparation and fabrication of CVD diamond films,and the difficulties in welding(bonding) of CVD diamond films with other kinds of materials.It is believed that on solving these problems,a new prosperous will be shown in the near future.更多还原