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高温湿氢脱碳对玻璃—金属封接质量的影响

Effects of decarburization at high temperature in humid hydrogen on glass-to-metal sealing

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【作者】 罗大为沈卓身杨鸿纪卫平

【Author】 LUO Da-wei1,SHEN Zhuo-shen1,YANG Hong2,JI Wei-ping2(1.School of Materials Science and Engineering,University of Science and Technology Beijing,Beijing 100083,China;2.Haiyang City Baiji Electronic Limited Liability Company,Haiyang Shandong 265100,China)

【机构】 北京科技大学材料科学与工程学院海阳市佰吉电子有限责任公司

【摘要】 利用CSA-2003碳硫分析仪、VHX-100K金相显微镜及ZHP-30D型氦质谱检漏仪等研究了高温湿氢脱碳对可伐合金引线碳含量、预氧化、气泡以及封接效果的影响。结果表明,虽然可伐合金引线在脱碳后碳含量降低,但其晶粒明显长大;氧化均遵循抛物线规律;可伐合金引线与玻璃封接时,熔融玻璃会沿着晶间氧化物向基体渗透,但对于脱碳后的可伐合金引线,玻璃穿透更深。现场试验表明,脱碳后的封接件并未表现出更加优良的气密性,相反却表现了引线断腿的迹象,因此建议金属玻璃封接厂省去目前的脱碳工艺。

【Abstract】 The effects of decarburization in humid hydrogen at high temperature on carbon content,pre-oxidation,gas bubbles of kovar alloy pin and sealing effects with glass were investigated with CSA-2003 Carbon/Sulphur analyzer,VHX-100K Digital Microscope and ZHP-30D HE Mass Spectra Leak Detector.The results show that the carbon content of the kovar pins decreases after decarburization but the grains are growth;oxidations obey parabolic law.When kovar pins seal with glass,molten glass penetrate into kovar substrate along the intergranular oxide,but as to decarburized kovar pins,the penetration depth of glass is deeper.On site experiment shows that after decarburization the sealing does not present better pressure tightness but appears broken pin.Therefore,it is suggested that the process of decarburation can be removed.

【关键词】 可伐合金脱碳封接气泡
【Key words】 kovar alloydecarburationsealinggas bubble
【基金】 国家自然科学基金项目(50671014)
  • 【文献出处】 金属热处理 ,Heat Treatment of Metals , 编辑部邮箱 ,2008年09期
  • 【分类号】TG115
  • 【被引频次】6
  • 【下载频次】362
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