【摘要】 对CO2、YAG和准分子激光器输出特性、吸收率、光强空间分布、熔覆特性和加工性能进行了比较。CO2和Nd:YAG激光空间分布的横截面图为高斯形,而准分子激光空间分布的横截面图为矩形。3种激光器的吸收率和加工精度依次是:准分子激光>Nd:YAG激光>CO2激光。3种激光器的平均输出功率和光斑直径依次是:准分子激光<Nd:YAG激光<CO2激光。CO2激光器适用于大功率、大尺寸,精度要求较低的加工和熔覆领域;Nd:YAG激光适用于中小功率、中小尺寸,精度要求较高的加工和熔覆领域;准分子激光器适用于小功率、小尺寸,精度要求很高的微纳加工、微电子业和生物医学领域。无论受辐射金属材料处于固相还是液相,Nd:YAG激光的吸收率均约为CO2激光的3倍多,因此Nd:YAG激光比CO2激光更适用于激光熔覆和激光金属直接成形制造。更多还原

【Abstract】 By comparing output performance,absorptivity,light intensity spatial distribution,cladding characteristics and machining performance of CO2,YAG and excimer lasers,the results show that cross-sectional charts of CO2 and YAG lasers’ spatial distribution(SD) are Gauss shape,but the SD of excimer laser’s is rectangle.The absorptivity and machining precision of the three lasers are in proper order:excimer laser > Nd:YAG laser > CO2 laser.The average output power and light spot diameter of the three lasers in proper order:excimer laser < Nd:YAG laser < CO2 laser.The CO2 laser is suitable for high power and large size,and the accuracy demands comparatively low in machining and cladding fields;Nd:YAG laser is fit for small and medium power,the small and medium dimension,and the accuracy demands higher in machining and cladding fields;Excimer laser is applicable to small power and small size,and the accuracy demands very high in micro-nano machining,micro-electrics and biomedicine fields.No matter how the irradiated materials are in solid phase or liquid phase,Nd:YAG laser’s absorptivity is about three times than higher CO2 laser’s,so Nd:YAG laser is fitter than CO2 laser for laser cladding and laser directly metal forming manufacturing.更多还原