【摘要】 利用掠入射X射线衍射(GIAXRD)研究了GCr15轴承钢表面等离子体浸没离子注入与沉积(PIII&D)氮化钛(TiN)薄膜后膜层表面的应力状态。用X射线衍射(XRD)分析了处理后膜层的化学组成。探讨了薄膜厚度和掠入射角对表面膜层中应力变化规律的影响。结果表明,表面膜层中主要存在TiN相,同时含有少量的TiO2和钛氮氧的化合物。不同工艺下,TiN/GCr15轴承钢试样表面膜层中存在的应力均为压应力;且应力值随着掠入射角度的增大而减小,随着薄膜厚度的增加而降低。更多还原

【Abstract】 Titanium nitride（TiN） films were fabricated on GCr15 bearing steel substrate by plasma immersion ion implantation and deposition（PIII&D） technique.The residual stress of the film was characterized by means of glazing incidence angle X-ray diffraction（GIAXRD） method.The effect of film thickness and glazing incidence angle on residual stress were investigated.X-ray diffraction（XRD） analysis indicates that（PⅢ&D） results in the formation of TiN phase and a small quantity of TiO₂ and TiN_xO_y.Residual stress measurement result shows that the stress exhibits compressive stress,and the compressive stress value decreases with increase of the film thickness and glazing incidence angle.更多还原